| Magnification | 10 to 60,000x |
| Imaging modes | High vacuum/Low vacuum |
| Electron gun | Small grid gun integrating filament and wehnelt |
| Accelarating voltage | 3 stages 15kV/10kV/5kV |
| Specimen stage | X-Y manual control; X: 35mm; Y:35mm |
| Maximum specimen size | Diameter 70mm, height 50mm |
| Z (WD) | 7 to 53mm |
| Signal detection | High vacuum (secondary electron image, backscattered electron image) Low vacuum (backscattered electron image) |
| Data display | Accelerating voltage, magnification, µ bar, µ value, etc |
| File format | BMP, TIFF, JPEG |
| Image memory pixels | 640 x 480 pixels, 1280 x 960 pixels |
| Photographing conditions | High speed, low speed 1, low speed 2 |
| Rotation | Scan rotation (90° steps or 1° steps |
| Image shift | Image shift control |
| Saving images | Images are automatically saved and numbered after photographing (scanning) is completed |
| System OS | Windows 7 |
| Automated functions | Auto focus, auto stigmator Auto contrast/brightness control Auto gun alignment |
| Composition | Base unit, power supply box, PC, LCD, rotary pump |
| Operation | Touch panel, mouse |
| Optional accessories | Tilt/rotation motor drive specimen chamber Energy dispersive X-ray spectrometer (EDS) |
| Base unit | 330 (W) x 490 (D) x 430 (H) mm |
| Power supply | Single phase AC 240V (960VA) Fluctuation +/-10% grounded |
| Room temperature | 15°C to 30°C |
| Humidity | 60% or less |