STACIS® iX Stage-BaseTMSTACIS® iX Stage-BaseTM is specifically designed to be built into advanced semiconductor tools which incorporate high precision motorised X-Y stages. Such tools require extemely efficiency vibration isolation. But, just as critical, these tools require that payload motion induced by the stage settle very quickly so as not to adversely impact tool throughput.

Stage-Base incorporates TMC's patented STACIS® technology to achieve extremely efficient vibration isolation using piezoelectric actuators and a stiff suspension.