TMC's AccuDockTM Precision Docking System allows extremely accurate docking of air-isolated payloads for the loading/off-loading of wafers in inspection/fabrication equipment. The isolated portion of the payload remains floating and isolated until a TTL signal instructs the payload to "dock". An adjustable volume of air is then vented from the isolators, gently lowering the layload onto a set of kinematic mounts. Off-payload wafer handlers are then positioned to within +/-0.001" in all degrees-of-freedom relative to the docked payload. After wafers are exchanged, the TTL signal can be switched, and the existing valving system is re-enabled. The payload is refloated (isolated), and the process can resume.