ExciStar XS Series
Small Size - High Reliability |
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The ExciStar XS is an extremely compact excimer laser that offers exceptional performance and lifetime characteristics at repetition rates of 200Hz and 500Hz.
Main features are:
Extremely compact size Available for 157nm, 193nm, 248nm and 351nm Repetition rates up to 200Hz and 500Hz New tube design "Almeta XS" Equipped with corona pre-ionisation and solid state switching Stand-alone or OEM version Air cooling, single phase Use of premix laser gax RoHS compliant |
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Extremely Compact Size
The ExciStar XS is the smallest and lightest excimer laser available from Coherent Inc, with dimensions of 649mm x 300mm x 400mm (LWH) and a weight of only 58kg. It contains several Coherent Inc innovations including an all-metal-sealed tube design (Almeta XS), corona preionisation and a solid state switch.
Almeta XS Tube Design
The heart of the ExciStar XS is the LDU (Laser Discharge Unit), which combines the Almeta XS tube with corona pre-ionisation and a solid-state-switch. The result is excpetional lifetime of these laser components. The "soft" discharge created by the solid state switch results in high pulse to pulse energy stability. In combination with corona preionisation, a more homogenous discharge is created with excellent pulse characteristics. An electrostatic dust remover traps generated dust particles, to extend the lifetime also.
Air Cooling, Single Phase
The ExciStar XS is an air cooled excimer laser system, making installation and operation as easy as possible. The laser operates with a single electrical phase and with a premix laser gas bottle.
Different Versions
The ExciStar XS is mainly available in two different versions, depending on the required repetition rate, up to 200Hz and 500Hz are possible. An energy monitor is also available as an option, if operation in constant energy mode is required.
Click to download the ExciStar XS datasheet from the Coherent Inc website.
| Wavelength (nm) |
157 |
193 |
248 |
351 |
| Max.Repetition Rate (Hz) |
200/500 |
200/500 |
200/500 |
200/500 |
| Max. Pulse Energy (mJ) |
2 |
8 |
12 |
6 |
| Stabilised Pulse Energy (mJ) |
1 |
5 |
8 |
4 |
| Average Pulse Power |
<0.2/0.5 |
1/2.5 |
1.6/4 |
0.8/2 |
| Energy Stability (sigma, %) |
2/3 |
2/3 |
2/3 |
2/3 |
| Beam Dimensions (FWHM, VxH, mm2) |
6 x 3 |
6 x 3 |
6 x 3 |
6 x 3 |
| Beam Divergence (FWHM, VxH, mrad2) |
2 x 1 |
2 x 1 |
2 x 1 |
2 x 1 |
| Pulse Duration (ns) (typ) |
5 |
5 |
5 |
5 |
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