We provide complete excimer laser and UV-DPSS laser micromachining systems that integrate the laser source with the beam delivery, diagnostics, parts handling, alignment and machine control. These tools are used for both production and R & D tasks in areas such as photolithography, micromaching, microdrilling, trimming, etching, wafer scribing and annealing in a variety of materials including (but not limited to) polymers, plastics, ceramics and glass. Systems are available that operate at 157nm, 193nm, 248nm, 266nm, 351nm and 355nm wavelengths.