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NT-MDT NTEGRA Prima SPM/AFM

Multifunctional device for performing the most typical tasks in the field of Scanning Probe Microscopy

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  • Closed loop control with the lowest noise level (can be used for scanning fields of <100nm)
  • Optical microscope with the resolution of 1µm
  • Scanning by sample (the lowest noise level, the best resolution on the small fields), scanning by probe (maximum scanning range, working with large samples)
  • More than 40 measuring modes, including unique ones
  • Carrying out experiments in air, in liquids, in controlled environment
  • Possibilty of expanding functionality


NTEGRA Prima is a multifunctional device for performing the most typical tasks in the field of Scanning Probe Microscopy. The device is capable of performing more than 40 measuring methods, analysing physical and chemical properties of the surface with high precision and resolution. It is possible to carry out experiments in air, as well as in liquids and in controlled environment. The new generation electronics provides operations in high-frequency (up to 5MHz) modes. This feature appears to be principal for the work with high-frequency AFM modes and using high-frequency cantilevers.

There are several scanning types implemented in the NTEGRA Prima: scanning by the sample, scanning by the probe and dual-scanning. This makes the system ideal for investigating small samples with ultra-high resolution (atomic-molecular level) as well as for big samples and scanning range up to 100 x 100 x 10µm. The unique DualScan mode allows investigation of even larger fields on the surface (200 x 200µm for X, Y and 22µm for Z) that can be useful, for example, for living cells and MEMS components.

Built-in three axes closed loop control sensors trace the real displacement of the scanner and compensate unavoidable imperfections of piezoceramics as non-linearity, creep and hysteresis. The sensors, which are used by NT-MDT, have the lowest noise level, thus allowing working with closed loop control on the very small fields (down to 10nm x 10nm). This is especially valuable for carrying out nanomanipulation and lithography modes.

Current and new NT-MDT users can now upgrade to Scanning Thermal Micrscopy, a technique which allows mapping of temperature and thermal conductivity of surfaces with <100nm spatial resolution. Click to download an application note to learn more.