LAMBDA SX series of high-power excimer lasers consists of KrF (248nm, K-Series) and XeCl (308nm, C-Series) industrial excimer lasers providing highly stabilised UV power to the production floor. These lasers feature a number of innovative technologies for unsurpassed performance and reliability.
Features include:
- PowerLok burst operation mode energy stabilisation
- TimeLok trigger-to-pulse stabilisation and time jitter reduction
- Single laser pulse detection software
- Hand-held terminal with advanced laser control software
- RS-232 interface
- Purged external resonator design for long-life laser optics and optimum beampointing stability
- Unique smooth ceramic preionisation for homogeneous beam profile and excellent pulse-to-pulse stability
- Advanced internal gas purification system for extended operation of laser gas and tube windows
- Slide valves with premounted tube windows for fast and secure tube window exchange
- NoveTube technology for outstanding gas and tube lifetimes