Accurate and Repeatable Dynamic MEMS Devices Characterisation
Date: Thursday 26 September 2013
Time: 4:00pm - 5:00pm AEST
Webinar Overview: MEMS devices are integral components in automobiles, consumer electronics and medical devices due to their small size, low power consumption and competitive costing.
One of the key barriers to MEMS acceptance in new applications is achieving and proving required reliability. While computer modeling of devices is increasingly sophisticated, the complexity and tight tolerances of MEMS devices requires a high degree of testing to ensure proper performance. Common failure modes of MEMS devices include external particulate contamination, fusing of components, stiction, electrostatic clamping, static overload, delamination, creep, environmental attack and fatigue. These failures may occur due to improper design, process variation or the way in which the device is operated and monitored. Correct characterisation of the MEMS devices is critical both to ensure proper final operation and to feed information back into the production process to correct potential errors.
This webinar will share how 3D microscopes may be used to fully characterise MEMS devices in terms of shape and motion properties over their range of operation. We will introduce how an Integrated 3D Microscope and Stroboscopic technology enables a fast, non-contact and accurate static and dynamic 3D characterisation of micro-devices.