Bruker PeakForce Deep Trench Probes

Bruker's new PeakForce Deep Trench (PFDT) series of probes are engineered to provide accurate depth metrology and imaging on the most challenging structures encountered on semiconductor samples and optics, including trenches and pits with aggressive aspect ratios and depth of more than 100nm.

The PFDT series complements Bruker's wide range of HAR and FIB probes such as HAR-1-200A-10, TESP-HAR, FIB2-100s, and others. While the HAR and FIB families of probes are traditionally used in Tapping mode, the PFDT series is specifically design for use on Dimension Icon with PeakForce Tapping technology.

PeakForce Tapping is well known to be ideal for aggressive geometries, as deep and narrow trenches, as it avoids air damping and sticking effects that plague approaches based on resonant modes such as Tapping or non-contact. The cantilever shape, spring constant, and resonance frequency of these probes are highly optimised for PeakForce Tapping, and the spike angle is tilt corrected for Dimension Icon. The result is repeatable, accurate metrology with high throughput and long tip life.

Choose from three probe models to address your range of applications.

PFDT350 provides a spike with 350nm length and 30nm wide

PFDT750 provides a spike with 750nm length and 65nm wide

PFDT2500 provides a spike with 2500nm length and 150nm wide