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Coherent COMPex Excimer Laser

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Coherent COMPex Excimer Laser

Coherent COMPex Excimer Laser

The Excimer Laser - Market Leading UV-Technology


COMPex excimer lasers are highly effective light sources, featuring compact design, easy installation and operation. They deliver superior results in demanding applications, such as solid sampling systems (LA-ICP-MS), materials research (PLD) and precise material processing.


The COMPex provides multi-hundred millijoules pulse energy plus unmatched pulse-to-pulse stability. The COMPex also comes with an improved gas processor that extends both gas and optics operation.


The new COMPex F2 dual wavelength 157 nm / 193 nm has been designed to extend the available wavelength range of the COMPex family, enabling conversion-free very short UV laser light at 157nm. The laser delivers 32mJ at 157 nm and 400mJ at 193nm.



  • 157 nm / 193 nm / 248 nm / 308 nm / 351 nm
  • Superior pulse energy of up to 750mJ to enable effective ablation at large field size
  • Unrivalled pulse stability of 0.75% rms to ensure high fluence control
  • Ultimate pulse control and system parameter logging to deliver smart and reproducible thin films
  • Instant energy switching
  • System parameter logging

For further information please contact us or download the datasheet.


   COMPex  Datasheet                                                    2020 Excimer Laser Catalogue


Read more on Coherent Inc's website