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Aerotech ANT Nanopositioning Stages

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Aerotech ANT Nanopositioning Stages

Sub-nanometre position stability and minimum incremental motion

Aerotech

The second-generation ANT nanopositioning stages are ideal for single- and multi-axis applications that require ultra-precise, high-throughput motion performance, including photonics assembly and inspection; fiber alignment and optimisation; optics manufacturing, testing and inspection; sensor testing and qualification; semiconductor processing and inspection; and research and laboratory applications.


Enhanced and new products include:

ANT95L & ANT130L Single-Axis Linear Nanopositioning Stages - Available in a variety of configurations, ANT95L and ANT130L stages excel at combining resolution, accuracy, repeatability, size and reliability. The ANT130L is now available in travel lengths up to 210 mm.

ANT95XY & ANT130XY Two-Axis XY Nanopositioning Stages - Ultra-precise ANT95XY and ANT130XY stages deliver superior planar performance with excellent geometric characteristics and can be further enhanced with ultra-high accuracy 2D error mapping. The integrated XY design is optimised for stiffness and dynamics, and a compact form factor allows for efficient machine and system design.

ANT95LZ & ANT130LZ Single-Axis Z Nanopositioning Stages - ANT95LZ and ANT130LZ stages are specifically engineered to provide nanometer-level motion and positioning performance in the vertical orientation. They feature a generous load capacity and a user-adjustable, low-friction pneumatic counterbalance.

ANT95LZS & ANT130LZS Low-Profile Z Nanopositioning Stages - ANT130LZS and the new ANT95LZS stages represent the pinnacle of vertical motion performance with a low profile. Featuring dual side-mounted pneumatic counterbalances with extremely low frictional characteristics, they deliver superior quality vertical motion in a compact form factor.


For further information please contact us or download the datasheet.

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